Semiconductor Applications

Perlast® seals have been specially developed to provide superior sealing solutions with enhanced performance amd improved functionality in the most critical semiconductor processes.

Perlast sealing materials help to minimize contamination and offer excellent chemical resistance, thereby increasing seal life expectancy in both wet and dry wafer processes.

Now is the time to upgrade to Perlast.

Benefits of using Perlast:
- Extended machine PM cycles
- Reduced process defects
- Optimized process conditions
- Lower particle generation
- Increased tool output
- Reduced cost of ownership

Purity
All semiconductor grades of Perlast® are processed in two custom-designed clean rooms totalling 4,500sq.ft, to avoid atmospheric contamination which can lead to a reduction in wafer yield.

MONOVAT® Gate Valve (pictured above) is a registered trademark of VAT Vacuumvalves AG.