Perlast® Semiconductor Chemical Compatibility
by process type: Etch, Deposition, Wet and Thermal.
Etch

|
Key:
1 = preferred
2 = alternative
3 = not recommended
|
Deposition

|
Key:
1 = preferred
2 = alternative
3 = not recommended
|
Wet

|
Key:
1 = preferred
2 = alternative
3 = not recommended
|
Thermal

|
Key:
1 = preferred
2 = alternative
3 = not recommended
|