Perlast® Semiconductor Chemical Compatibility

by process type: Etch, Deposition, Wet and Thermal.

Etch

 

Key:

1 = preferred

2 = alternative

3 = not recommended

Deposition

 

Key:

1 = preferred

2 = alternative

3 = not recommended

Wet

 

Key:

1 = preferred

2 = alternative

3 = not recommended

Thermal

 

Key:

1 = preferred

2 = alternative

3 = not recommended

 
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