Wafer Handling Components

High purity, Perlast® perfluoroelastoer materials are widely used as end-effctor pads as they prevent particulation due to their wholly organic nature.

Perlast are experts in providing low contact force solutions and can help you optimize your designs using our materials expertise and advanced design tools, such as non-linear finite element analysis.

Small O-rings are commonly used as wafer handling components, however, custom designs of end-effector pads ensure improved pad retention into mating hardware and simplied assembly.

The Perlast® range of materials includes elastomers with both low and high coefficients of friction, to allow tailoring of wafer retention force.